Patents and Patent Applications

  • D. Cooperberg, V. Vahedi, R. Douglas, H. Singh, N. Benjamin, "Tunable multi-zone gas injection system," US Patent Application 20030070620, April 17, 2003
  • N. Benjamin, D. Cooperberg, "Plasma processor coil," US Patent 7,571,697, August 11, 2009
  • D. Cooperberg, V. Vahedi, "Enhanced process and profile simulator algorithms," US Patent 6,804,572, October 12, 2004
  • D. Cooperberg, V. Vahedi, "Applications of a semi-empirical, physically based, profile simulator," US Patent 6,577,915, June 10, 2003
  • J.E. Daugherty, N. Benjamin, J. Bogart, V. Vahedi, D. Cooperberg, A. Miller, Y. Yamaguchi, "Techniques for improving etch rate uniformity," US Patent 6,344,105, February 5, 2002
  • D. Cooperberg, R.A. Gottscho, V. Vahedi, "Method and apparatus to calibrate a semi-empirical process simulator," US Patent 6,301,510, October 9, 2001