Publications and Presentations

  • “Surface and Reactor Dynamics Governing Photoresist Trim and Organic BARC Open Plasma Processing,” D.J. Cooperberg, S. Johnston, D. Horak, V. Vahedi; 50th American Vacuum Society International Symposium, Baltimore, MD, November 2-7, 2003
  • “Feature Scale Model of Etching High Aspect Ratio Structures in Silicon using SF6/O2 Plasma,” R.J. Belen, S. Gomez, M.W. Kiehlbauch, D.J. Cooperberg, E.S. Aydil; 50th American Vacuum Society International Symposium, Baltimore, MD, November 2-7, 2003
  • “Semi-empirical profile simulation of aluminum etching in a CI2/BC1 plasma,” D.J. Cooperberg, V. Vahedi, R.A. Gottscho; Journal of Vacuum Science and Technology A, September 2002, vol. 20(5), pp.1536-1556.
  • “Predictive Profile Evolution Simulation in Plasma Etching,” V. Vahedi, D.J. Cooperberg, L.B. Braly, R.A. Gottscho; invited paper, 48th American Vacuum Society International Symposium, San Francisco, CA, October 28 – November 2, 2001.
  • “Experimental and Modeling Results for Process Scaling from 200 mm to 300 mm Wafers,” S.C. Siu, D. Cooperberg, V. Vahedi, R. Patrick; 47th American Vacuum Society International Symposium, Boston, MA, October 2-6, 2000
  • “A General Predictive Semi-Empirical Feature Profile Simulator,” D.J. Cooperberg, V. Vahedi; 45th American Vacuum Society International Symposium, Baltimore, MD, November 2-6, 1998.
  • “Profile Control of Sub -0.3mm Contact Etch Features in a Medium-Density Oxide Etch Reactor,” D. Keil, D. Cooperberg, L. Li, G. Mueller, T. Nguyen, K. Khajehnouri, V. Vahedi, and G. Hills; Electrochemical Society 193rd Meeting, Dielectric Science and Technology Division, San Diego, CA, May 3-8, 1998.
  • “Surface Wave Sustained Plasmas in a Metal Bound Plasma Slab,” D.J. Cooperberg and C.K. Birdsall; Plasma Sources Science and Technology, February 1998, vol. 7, (no.1) pp 41-53
  • “Series Resonance Sustained Plasmas in a Metal Bound Plasma Slab,” D.J. Cooperberg and C.K. Birdsall; Plasma Sources Science and Technology, February 1998, vol. 7, (no.1) pp 96-113
  • “Electron Surface Waves in a Non-uniform Plasma Slab,” D.J. Cooperberg; Physics of Plasmas, April 1998, vol. 5, (no.4), pp.862-72
  • “Electron Surface Waves in a Plasma Slab with Uniform Ion Density,” D.J. Cooperberg; Physics of Plasmas, April 1998, vol. 5, (no.4), pp.853-61